CoastalPVA

Dual Pore

Our patented Dual Pore PVA technology delivers a brush with a pore system designed to optimize flush and deliver optimal flow to your post-CMP cleaning process. The Coastal PVA Dual Pore Brush provides water an expanded path via larger pores from the core while maintaining smaller pores at the surface to ensure efficient particulate elimination. Coastal PVA's Dual Pore Brush is engineered to deliver superior performance and wafer to wafer consistency in post-CMP wafer cleaning applications.

Coastal PVA's patented Dual Pore PVA technology will provide your post-CMP process with:

• Improved flow rates and better flush through the brush
• Optimized flush of particulates resulting in less build-up and particle defects reducing microscratching
• Better yields attributed to higher purity
• Higher consistency in your cleaning process
• Elimination of pre-cleaning
• Compatible with multiple chemistries and Low-K materials

Bonded Core

Unlike mounted or molded core technologies, Coastal PVA's patented Bonded on Core technology bonds the brush to the core thermally without any adhesives. The technology allows the built-in core of our PVA brushes to dynamically adjust to the brushes revolutions on your post-CMP cleaning machines eliminating friction between our PVA brushes and their core.

Unlike standalone, friction fitted or molded to the core products, our thermally bonded to the core brush eliminates twisting and crawling of the PVA brush and allows you process flexibility in your tool set up to improve productivity and yields. In addition, PVA slippage and expansion is no longer an issue with the use of our Bonded On Core PVA Brushes. The Bonded on Core technology provides lifetime stability and consistent performance and does not require manual mounting to the core eliminating occurrences of operator error.

• Our Experience

  Coastal PVA is a technology driven manufacturer with a history of excellence and innovation.

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• Technology

  Coastal PVA's brushes are manufactured with our patent pending Dual Pore and "Bonded on Core" technology.

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• Trial Program

  We provide potential customers with the opportunity to try our PVA Products.

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